Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 松田 時宜古田 守平松 孝浩 他
- Series Title
- Alternative Title
- Deposition of insulator films with new facing electrodes CVD for low temperature devices
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 110(404) 2011.1.28・29
- Volume
- 110
- Issue
- 404