自己組織化材料を利用したナノ・マイクロファブリケーション--ナチュラルリソグラフィー (小特集 自己組織化と表面処理)
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- Material Type
- 記事
- Author/Editor
- 阿相 英孝小野 幸子
- Series Title
- Alternative Title
- Nano- and microfabrication using self-organized materials: natural lithography
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 62(2) 2011.2
- Volume
- 62
- Issue
- 2