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Volume number49(7) 2010.7
MEMS技術の最新動...

MEMS技術の最新動向--東北大学におけるプロジェクト (特集 応用分野を拡大するマイクロマシン製品/MEMS技術)

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MEMS技術の最新動向--東北大学におけるプロジェクト

(特集 応用分野を拡大するマイクロマシン製品/MEMS技術)

Call No. (NDL)
Z16-225
Bibliographic ID of National Diet Library
11011198
Material type
記事
Author
江刺 正喜
Publisher
東京 : 工業調査会
Publication date
2010-07
Material Format
Paper
Journal name
電子材料 49(7) 2010.7
Publication Page
p.10~14
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Paper

Material Type
記事
Author/Editor
江刺 正喜
Author Heading
Periodical title
電子材料
No. or year of volume/issue
49(7) 2010.7
Volume
49
Issue
7
Pages
10~14