ナノスケール計測におけるロバストネス--走査型プローブ顕微鏡の新技術 (「ロバストネスを探る」特集号)
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- Material Type
- 記事
- Author/Editor
- 阿部 真之杉本 宜昭森田 清三
- Series Title
- Alternative Title
- Robustness in nano-scale measurement: new techniques for scanning probe microscopy
- Periodical title
- システム・制御・情報 = Systems, control and information : システム制御情報学会誌
- No. or year of volume/issue
- 55(4) 2011
- Volume
- 55
- Issue
- 4