Volume number56(3) 2011
超精密位置決め用空気...

超精密位置決め用空気圧サーボ軸受アクチュエータの開発 (特集 "超"を目指す気体軸受技術の最前線)

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超精密位置決め用空気圧サーボ軸受アクチュエータの開発

(特集 "超"を目指す気体軸受技術の最前線)

Call No. (NDL)
Z16-540
Bibliographic ID of National Diet Library
11040745
Material type
記事
Author
佐々木 勝美ほか
Publisher
東京 : 日本トライボロジー学会 ; 1989-
Publication date
2011
Material Format
Paper
Journal name
トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編 56(3) 2011
Publication Page
p.149~154
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Paper

Material Type
記事
Author/Editor
佐々木 勝美
平山 朋子
Alternative Title
Development of pneumatic servo bearing actuator for ultra-precise positioning
Periodical title
トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
No. or year of volume/issue
56(3) 2011
Volume
56
Issue
3