圧電・超音波材料 RFバイアススパッタ法による簡便なc軸平行配向ZnO膜の形成--RFバイアスを用いたイオン照射による結晶配向制御

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Material Type: 記事
Title: 圧電・超音波材料 RFバイアススパッタ法による簡便なc軸平行配向ZnO膜の形成--RFバイアスを用いたイオン照射による結晶配向制御
Author/Editor: 高柳真司
松川真美
渡辺好章他
Author Heading: 高柳真司
松川真美
渡辺好章
Periodical title: 超音波techno / 超音波techno編集部編
No. or year of volume/issue: 23(2) (通号 209) 2011.3・4
Volume: 23
Issue: 2
Sequential issue number: 209
Pages: 59～62
Publication date of volume/issue (W3CDTF): 2011
ISSN (Periodical Title): 0916-2410
ISSN-L (Periodical Title): 0916-2410
Publication (Periodical Title): 東京 : 日本工業出版
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1555
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 11043308
http://id.ndl.go.jp/bib/11043308
Bibliographic Record Category (NDL): 632