教科書から一歩進んだ身近な製品の化学化学機械研磨(CMP)と研磨剤

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Material Type: 記事
Title: 教科書から一歩進んだ身近な製品の化学化学機械研磨(CMP)と研磨剤
Author/Editor: 土肥俊郎
山崎努
大西修他
Author Heading: 土肥俊郎
山崎努
大西修
Periodical title: 化学と教育 = Chemistry & education
No. or year of volume/issue: 59(3) 2011
Volume: 59
Issue: 3
Pages: 152～155
Publication date of volume/issue (W3CDTF): 2011
ISSN (Periodical Title): 0386-2151
ISSN-L (Periodical Title): 0386-2151
Publication (Periodical Title): 東京 : 日本化学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP1
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-60
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 11050767
http://id.ndl.go.jp/bib/11050767
Bibliographic Record Category (NDL): 632