単結晶SiC基板の紫外光支援研磨特性における粒子の影響

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単結晶SiC基板の紫外光支援研磨特性における粒子の影響

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
11062335
Material type
記事
Author
山口 桂司ほか
Publisher
東京 : 砥粒加工学会
Publication date
2011-04
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 55(4) (通号 344) 2011.4
Publication Page
p.220~225
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Paper

Material Type
記事
Author/Editor
山口 桂司
峠 睦
久保田 章亀 他
Alternative Title
Effect of particles on UV-polishing characteristics of single crystal SiC substrate
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
55(4) (通号 344) 2011.4
Volume
55
Issue
4
Sequential issue number
344