大気中での表面改質によるシリコーンとガラスの固体間直接接着法
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- Material Type
- 記事
- Author/Editor
- 岡田 渉山本 貴富喜
- Alternative Title
- Direct bonding between silicone and glass by atmospheric-pressure surface modification
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 131(4) 2011.4
- Volume
- 131
- Issue
- 4
- Pages
- 159～164