Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 服部 毅
- Author Heading
- Alternative Title
- Problems and prospects of the most advanced semiconductor cleaning: ultraclean water-related problems and waterless cleaning challenges
- Periodical title
- 空気清浄 : コンタミネーションコントロール
- No. or year of volume/issue
- 48(6) (通号 310) 2011
- Volume
- 48
- Issue
- 6
- Sequential issue number
- 310