YAGレーザーを用い...

YAGレーザーを用いたパルスレーザーメルティング法による硫黄を過飽和ドープした結晶シリコンの作成

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YAGレーザーを用いたパルスレーザーメルティング法による硫黄を過飽和ドープした結晶シリコンの作成

Call No. (NDL)
Z14-125
Bibliographic ID of National Diet Library
11079175
Material type
記事
Author
中川 将ほか
Publisher
神戸 : 甲南大学
Publication date
2010
Material Format
Paper
Journal name
甲南大学紀要. 理工学編 = Memoirs of Konan University. Science and engineering series / 甲南大学 編 57(1) 2010
Publication Page
p.29~34
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Paper

Material Type
記事
Author/Editor
中川 将
内藤 宗幸
香野 淳 他
Alternative Title
Preparation of single crystalline silicon layer supersaturated with sulfur by pulsed YAG laser melting method
Periodical title
甲南大学紀要. 理工学編 = Memoirs of Konan University. Science and engineering series / 甲南大学 編
No. or year of volume/issue
57(1) 2010
Volume
57
Issue
1
Pages
29~34