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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 岩井 洋介南野 郁夫田中 政仁 他
- Series Title
- Alternative Title
- Set point generation method for uniform temperature control on work surface
- Periodical title
- 電気学会研究会資料. IIC / 電気学会産業計測制御研究会 [編]
- No. or year of volume/issue
- 2011(49-53・55-71) 2011.3.8
- Volume
- 2011
- Issue
- 49-53・55-71