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Effect of dropping hydrofluoroether in thermal nanoimprint on polycarbonate (Special issue: Microprocesses and nanotechnology)

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Effect of dropping hydrofluoroether in thermal nanoimprint on polycarbonate

(Special issue: Microprocesses and nanotechnology)

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
11131168
Material type
記事
Author
Harutaka Mekaruほか
Publisher
Tokyo : The Japan Society of Applied Physics
Publication date
2011-06
Material Format
Paper
Journal name
Japanese journal of applied physics : JJAP 50(6) (2) 2011.6
Publication Page
p.06GK05-1~7
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Paper

Material Type
記事
Author/Editor
Harutaka Mekaru
Hiroshi Hiroshima
Periodical title
Japanese journal of applied physics : JJAP
No. or year of volume/issue
50(6) (2) 2011.6
Volume
50
Issue
6
Other Volume
2