カルーセルスパッタ法で作製したCoFe系GHz帯磁性薄膜の異方性入射効果と原子配列 (特集 高周波マイクロ磁気応用技術の最前線)
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- Material Type
- 記事
- Author/Editor
- 今泉 良一宗像 誠大越 正敏 他
- Series Title
- Alternative Title
- Effect of anisotropic incidence and atomic arrangement of CoFe system magnetic thin films for the GHz frequency in the carousel sputtering method
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 131(7) 2011.7
- Volume
- 131
- Issue
- 7