Holdings of Libraries in Japan
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 工藤 昌宏Hong-An Shih赤堀 誠志 他
- Series Title
- Author Heading
- Alternative Title
- Effects of surface pre-treatments for AlN sputtering and Al2O3 atomic layer depositions on GaAs(001)
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 111(167) 2011.7.29・30
- Volume
- 111
- Issue
- 167