Volume number47(9) 2011.9
半導体搬送用台車のモ...

半導体搬送用台車のモデリングとキャリブレーション--フープ積載量に対するモデル精密化 (特集 産業応用分野に貢献する制御技術の最前線)

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半導体搬送用台車のモデリングとキャリブレーション--フープ積載量に対するモデル精密化

(特集 産業応用分野に貢献する制御技術の最前線)

Call No. (NDL)
Z14-482
Bibliographic ID of National Diet Library
11281837
Material type
記事
Author
澤田 賢治ほか
Publisher
東京 : 計測自動制御学会 ; [1965]-
Publication date
2011-09
Material Format
Paper
Journal name
計測自動制御学会論文集 = Transactions of the Society of Instrument and Control Engineers 47(9) 2011.9
Publication Page
p.412~419
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Paper

Material Type
記事
Author/Editor
澤田 賢治
田中 香介
新 誠一 他
Alternative Title
Modeling and calibration of automatic guided vehicle: model refinement for FOUP load
Periodical title
計測自動制御学会論文集 = Transactions of the Society of Instrument and Control Engineers
No. or year of volume/issue
47(9) 2011.9
Volume
47
Issue
9