高周波スパッタリングによる化学量論的KTa1-xNbxO3膜の作製

Journal name: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials 97(6) 1977.06

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Material Type: 記事
Title: 高周波スパッタリングによる化学量論的KTa1-xNbxO3膜の作製
Author/Editor: 深海竜夫
土屋英俊
Author Heading: 深海竜夫
土屋英俊
Periodical title: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
No. or year of volume/issue: 97(6) 1977.06
Volume: 97
Issue: 6
Pages: p322～328
Publication date of volume/issue (W3CDTF): 1977-06
ISSN (Periodical Title): 0385-4205
ISSN-L (Periodical Title): 0385-4205
Publication (Periodical Title): 東京 : 電気学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN31
Target Audience: 一般
Article Type: 記事分類: 電気工学--電気材料・部品
Holding library: 国立国会図書館
Call No.: Z16-793
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 1831074
http://id.ndl.go.jp/bib/1831074
Bibliographic Record Category (NDL): 632