薄膜キャパシタにおける誘電破壊特性測定装置の試作
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- Material Type
- 記事
- Author/Editor
- 中川 博雅土田 義和古川 友三
- Periodical title
- 応用電気研究所報告
- No. or year of volume/issue
- 29(4) 1977.12
- Volume
- 29
- Issue
- 4
- Pages
- p235～245
- Publication date of volume/issue (W3CDTF)
- 1977-12