概説(シリコン結晶のゲッタリング(技術ノート))

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Material Type: 記事
Title: 概説
Author/Editor: 杉田吉充
吉中明
Series Title: シリコン結晶のゲッタリング(技術ノート)
Author Heading: 杉田吉充
吉中明
Periodical title: 応用物理
No. or year of volume/issue: 48(2) 1979.02
Volume: 48
Issue: 2
Pages: p139
Publication date of volume/issue (W3CDTF): 1979-02
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 2041076
http://id.ndl.go.jp/bib/2041076
Bibliographic Record Category (NDL): 632