プラズマスパッタ白金薄膜の作製条件と電気的特性の関係
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- Material Type
- 記事
- Author/Editor
- 滝口 勝美 他
- Author Heading
- Periodical title
- 大阪府立工業技術研究所報告 / 大阪府立工業技術研究所 編
- No. or year of volume/issue
- (通号 74) 1979.02
- Sequential issue number
- 74
- Pages
- p37～41
- Publication date of volume/issue (W3CDTF)
- 1979-02
- ISSN (Periodical Title)
- 0285-5267