イオンスタッパ加工法...

イオンスタッパ加工法の研究-1-Si単結晶のイオンスタッパ加工による格子不整

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イオンスタッパ加工法の研究-1-Si単結晶のイオンスタッパ加工による格子不整

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
2045319
Material type
記事
Author
宮本 岩男ほか
Publisher
東京 : 精機学会 ; [1933]-1985
Publication date
1979-03
Material Format
Paper
Journal name
精密機械 = Journal of the Japan Society of Precision Engineering : 精機学会誌 45(3) 1979.03
Publication Page
p.p292~298
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Paper

Material Type
記事
Author/Editor
宮本 岩男
谷口 紀男
Periodical title
精密機械 = Journal of the Japan Society of Precision Engineering : 精機学会誌
No. or year of volume/issue
45(3) 1979.03
Volume
45
Issue
3
Pages
p292~298
Publication date of volume/issue (W3CDTF)
1979-03