クラスタイオンビーム蒸着法によるInSbおよびGaAs薄膜の作製

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Material Type: 記事
Title: クラスタイオンビーム蒸着法によるInSbおよびGaAs薄膜の作製
Author/Editor: 高木俊宜他
Author Heading: 高木俊宜
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 22(7) 1979.07
Volume: 22
Issue: 7
Pages: p267～272
Publication date of volume/issue (W3CDTF): 1979-07
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Article Type: 記事分類: 物理学--分子・物性--液晶
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 2057554
http://id.ndl.go.jp/bib/2057554
Bibliographic Record Category (NDL): 632