気体凝縮層によるクラ...

気体凝縮層によるクライオソープション・ポンピング

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気体凝縮層によるクライオソープション・ポンピング

Call No. (NDL)
Z14-198
Bibliographic ID of National Diet Library
2060497
Material type
記事
Author
荒川 一郎ほか
Publisher
東京 : 東京大学生産技術研究所
Publication date
1979-08
Material Format
Paper
Journal name
生産研究 : 東京大学生産技術研究所所報 = Journal of Institute of Industrial Science, The University of Tokyo 31(8) 1979.08
Publication Page
p.p597~605
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Paper Digital

Material Type
記事
Author/Editor
荒川 一郎
辻 泰
Author Heading
Periodical title
生産研究 : 東京大学生産技術研究所所報 = Journal of Institute of Industrial Science, The University of Tokyo
No. or year of volume/issue
31(8) 1979.08
Volume
31
Issue
8
Pages
p597~605
Publication date of volume/issue (W3CDTF)
1979-08