Volume numberC C 62(10)(142)
直流2極スパッタ法で...

直流2極スパッタ法で作成されたZnO圧電膜超音波トランスジューサの絶縁破壊特性

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直流2極スパッタ法で作成されたZnO圧電膜超音波トランスジューサの絶縁破壊特性

Call No. (NDL)
Z16-607
Bibliographic ID of National Diet Library
2066724
Material type
記事
Author
山水 秀一郎
Publisher
東京 : 電子通信学会
Publication date
1979-10
Material Format
Digital
Journal name
電子通信学会論文誌. C = The Transactions of the Institute of Electronics and Communication Engineers of Japan / 電子通信学会 編 62(10) 1979.10
Publication Page
p.p689~695
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Digital

Material Type
記事
Author/Editor
山水 秀一郎
Author Heading
Periodical title
電子通信学会論文誌. C = The Transactions of the Institute of Electronics and Communication Engineers of Japan / 電子通信学会 編
No. or year of volume/issue
62(10) 1979.10
Volume
62
Issue
10
Pages
p689~695
Publication date of volume/issue (W3CDTF)
1979-10