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ボルツマンーマタノ法によるシリコン中のリン拡散定数の解析

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ボルツマンーマタノ法によるシリコン中のリン拡散定数の解析

Call No. (NDL)
Z14-467
Bibliographic ID of National Diet Library
2069272
Material type
記事
Author
柚賀 正光
Publisher
八王子 : 東京工業高等専門学校
Publication date
1979-11
Material Format
Paper
Journal name
東京工業高等専門学校研究報告書 = Research reports of Tokyo National College of Technology / 東京工業高等専門学校図書委員会 編 (通号 11) 1979.11
Publication Page
p.p77~81
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Paper

Material Type
記事
Author/Editor
柚賀 正光
Author Heading
Periodical title
東京工業高等専門学校研究報告書 = Research reports of Tokyo National College of Technology / 東京工業高等専門学校図書委員会 編
No. or year of volume/issue
(通号 11) 1979.11
Sequential issue number
11
Pages
p77~81
Publication date of volume/issue (W3CDTF)
1979-11
ISSN (Periodical Title)
0286-0503