雑誌東京電機大学工学部研究報告
Volume number(28)
ArticleDLTS(Deep ...

DLTS(Deep Level Transient Spectroscopy)測定装置の試作

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DLTS(Deep Level Transient Spectroscopy)測定装置の試作

Call No. (NDL)
Z16-312
Bibliographic ID of National Diet Library
2297637
Material type
記事
Author
五島 奉文ほか
Publisher
東京 : 東京電機大学工学部
Publication date
1980-12
Material Format
Digital
Journal name
東京電機大学工学部研究報告 / 東京電機大学工学部 編 (通号 28) 1980.12
Publication Page
p.p65～72
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Digital

Material Type
記事
Title
DLTS(Deep Level Transient Spectroscopy)測定装置の試作
Author/Editor
五島 奉文
六倉 信喜
町 好雄
Author Heading
五島 奉文
六倉 信喜
町 好雄
Periodical title
東京電機大学工学部研究報告 / 東京電機大学工学部 編
No. or year of volume/issue
(通号 28) 1980.12
Sequential issue number
28
Pages
p65～72
Publication date of volume/issue (W3CDTF)
1980-12
ISSN (Periodical Title)
0389-617X