反応性マグネトロンスパッタによるc軸配向AlN膜の作成

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反応性マグネトロンスパッタによるc軸配向AlN膜の作成

Call No. (NDL)
Z16-793
Bibliographic ID of National Diet Library
2326976
Material type
記事
Author
武田 文雄 他
Publisher
東京 : 電気学会
Publication date
1981-09
Material Format
Paper
Journal name
電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials 101(9) 1981.09
Publication Page
p.p483~488
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Paper

Material Type
記事
Author/Editor
武田 文雄 他
Author Heading
Periodical title
電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
No. or year of volume/issue
101(9) 1981.09
Volume
101
Issue
9
Pages
p483~488
Publication date of volume/issue (W3CDTF)
1981-09