InP液相成長における液相エッチングの最適化

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Material Type: 記事
Title: InP液相成長における液相エッチングの最適化
Author/Editor: 山賀重来
吉川明彦
葛西晴雄
Author Heading: 山賀重来
吉川明彦
葛西晴雄
Periodical title: 千葉大学工学部研究報告 / 千葉大学工学部編
No. or year of volume/issue: 35(1) 1983.09
Volume: 35
Issue: 1
Pages: p63～71
Publication date of volume/issue (W3CDTF): 1983-09
ISSN (Periodical Title): 0577-6848
ISSN-L (Periodical Title): 0577-6848
Publication (Periodical Title): 千葉 : 千葉大学工学部
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--集積回路
Holding library: 国立国会図書館
Call No.: Z14-219
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 2604354
http://id.ndl.go.jp/bib/2604354
Bibliographic Record Category (NDL): 632