プラズマ重合多層レジストの効果(速報)

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Material Type: 記事
Title: プラズマ重合多層レジストの効果(速報)
Author/Editor: 玉野順次他
Author Heading: 玉野順次
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 26(12) 1983.12
Volume: 26
Issue: 12
Pages: p919～921
Publication date of volume/issue (W3CDTF): 1983-12
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Article Type: 記事分類: 物理学--分子・物性
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 2613134
http://id.ndl.go.jp/bib/2613134
Bibliographic Record Category (NDL): 632