金蒸着膜における内部応力の発生から緩和に至る過程

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Material Type: 記事
Title: 金蒸着膜における内部応力の発生から緩和に至る過程
Author/Editor: 三谷英機
Author Heading: 三谷英機
Periodical title: 阿南工業高等専門学校研究紀要 / 阿南工業高等専門学校編
No. or year of volume/issue: (通号 20) 1984.03
Sequential issue number: 20
Pages: p59～65
Publication date of volume/issue (W3CDTF): 1984-03
ISSN (Periodical Title): 0570-006X
ISSN-L (Periodical Title): 0570-006X
Publication (Periodical Title): 阿南 : 阿南工業高等専門学校
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZV1
Target Audience: 一般
Article Type: 記事分類: 物理学--分子・物性
Holding library: 国立国会図書館
Call No.: Z22-35
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 2980210
http://id.ndl.go.jp/bib/2980210
Bibliographic Record Category (NDL): 632