スパッタによるタングステン膜の特性と4μmグレーティングの製作

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Material Type: 記事
Title: スパッタによるタングステン膜の特性と4μmグレーティングの製作
Author/Editor: 山本稔
岡本孝太郎
今井哲二
Author Heading: 山本稔
岡本孝太郎
今井哲二
Periodical title: 電気通信大学学報 / 電気通信大学編
No. or year of volume/issue: 35(1) 1984.08
Volume: 35
Issue: 1
Pages: p7～12
Publication date of volume/issue (W3CDTF): 1984-08
ISSN (Periodical Title): 0493-4253
ISSN-L (Periodical Title): 0493-4253
Publication (Periodical Title): 調布 : 電気通信大学
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZV1
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--集積回路
Holding library: 国立国会図書館
Call No.: Z22-529
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3006321
http://id.ndl.go.jp/bib/3006321
Bibliographic Record Category (NDL): 632