ドライエッチング装置における安全対策

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Material Type: 記事
Title: ドライエッチング装置における安全対策
Author/Editor: 岡田隆
鵜飼勝三
塚田勉
Author Heading: 岡田隆
鵜飼勝三
塚田勉
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 28(3) 1985.03
Volume: 28
Issue: 3
Pages: p119～124
Publication date of volume/issue (W3CDTF): 1985-03
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Article Type: 記事分類: 電気工学--電子工学--電子応用機器
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3018866
http://id.ndl.go.jp/bib/3018866
Bibliographic Record Category (NDL): 632