形状及び表面粗さ測定...

形状及び表面粗さ測定における非接触高精度化 (光学的非接触方式による高精密測定技術<特集>)

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形状及び表面粗さ測定における非接触高精度化

(光学的非接触方式による高精密測定技術<特集>)

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
3026634
Material type
記事
Author
塚田 忠夫
Publisher
東京 : 精機学会 ; [1933]-1985
Publication date
1985-04
Material Format
Paper
Journal name
精密機械 = Journal of the Japan Society of Precision Engineering : 精機学会誌 51(4) 1985.04
Publication Page
p.p663~667
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Paper

Material Type
記事
Author/Editor
塚田 忠夫
Author Heading
Periodical title
精密機械 = Journal of the Japan Society of Precision Engineering : 精機学会誌
No. or year of volume/issue
51(4) 1985.04
Volume
51
Issue
4
Pages
p663~667