放電プラズマの大電流大面積イオン源への応用と問題点(低温プラズマ特集号)

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Material Type: 記事
Title: 放電プラズマの大電流大面積イオン源への応用と問題点
Author/Editor: 浦本上進解説
Series Title: 低温プラズマ特集号
Author Heading: 浦本上進
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 28(4) 1985.04
Volume: 28
Issue: 4
Pages: p222～228
Publication date of volume/issue (W3CDTF): 1985-04
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3031080
http://id.ndl.go.jp/bib/3031080
Bibliographic Record Category (NDL): 632