半導体力学量センサ(力のダイナミックセンシング<特集>)

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 52(4) 1986.04

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Material Type: 記事
Title: 半導体力学量センサ
Author/Editor: 五十嵐伊勢美
Series Title: 力のダイナミックセンシング<特集>
Author Heading: 五十嵐伊勢美
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 52(4) 1986.04
Volume: 52
Issue: 4
Pages: p590～594
Publication date of volume/issue (W3CDTF): 1986-04
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3075537
http://id.ndl.go.jp/bib/3075537
Bibliographic Record Category (NDL): 632