エッチング(半導体工業における機械工学<特集> ; 半導体デバイスの製造技術)

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: エッチング
Author/Editor: 黒木幸令
Series Title: 半導体工業における機械工学<特集> ; 半導体デバイスの製造技術
Author Heading: 黒木幸令
Periodical title: 日本機械学会誌
No. or year of volume/issue: 89(809) 1986.04
Volume: 89
Issue: 809
Pages: p382～389
Publication date of volume/issue (W3CDTF): 1986-04
ISSN (Periodical Title): 0021-4728
ISSN-L (Periodical Title): 0021-4728
Publication (Periodical Title): 東京 : 日本機械学会 ; 1938-
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-110
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3078761
http://id.ndl.go.jp/bib/3078761
Bibliographic Record Category (NDL): 632