水素化アモルファスシリコン薄膜の構造変化
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- Material Type
- 記事
- Title
- Author/Editor
- 本橋 光也
- Author Heading
- Periodical title
- 東京電機大学工学部研究報告 / 東京電機大学工学部 編
- No. or year of volume/issue
- (通号 33) 1985.12
- Sequential issue number
- 33
- Pages
- p45～65
- Publication date of volume/issue (W3CDTF)
- 1985-12
- ISSN (Periodical Title)
- 0389-617X