走査電子顕微鏡(SEM)による表面形状測定の研究--法線検出法による

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Material Type: 記事
Title: 走査電子顕微鏡(SEM)による表面形状測定の研究--法線検出法による
Author/Editor: 大堀真敬
佐藤寿芳
Author Heading: 大堀真敬
佐藤寿芳
Periodical title: 日本機械学会論文集. C編
No. or year of volume/issue: 52(483) 1986.11
Volume: 52
Issue: 483
Pages: p2974～2981
Publication date of volume/issue (W3CDTF): 1986-11
ISSN (Periodical Title): 0387-5024
ISSN-L (Periodical Title): 0387-5024
Publication (Periodical Title): 東京 : 日本機械学会 ; 1979-2010
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Article Type: 記事分類: 測定・測定器
Holding library: 国立国会図書館
Call No.: Z16-1056
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3100656
http://id.ndl.go.jp/bib/3100656
Bibliographic Record Category (NDL): 632