LPEマクロステップと不純物不均一分布(半導体における局所偏析現象<特集> ; 成長誘起不純物偏析現象)

Journal name: 日本結晶成長学会誌 = Journal of the Japanese Association for Crystal Growth 13(2・3) 1986.10

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Material Type: 記事
Title: LPEマクロステップと不純物不均一分布
Author/Editor: 西永頌
朴康司
笹岡千秋
Series Title: 半導体における局所偏析現象<特集> ; 成長誘起不純物偏析現象
Author Heading: 西永頌
朴康司
笹岡千秋
Periodical title: 日本結晶成長学会誌 = Journal of the Japanese Association for Crystal Growth
No. or year of volume/issue: 13(2・3) 1986.10
Volume: 13
Issue: 2・3
Pages: p136～143
Publication date of volume/issue (W3CDTF): 1986-10
ISSN (Periodical Title): 0385-6275
ISSN-L (Periodical Title): 0385-6275
Publication (Periodical Title): 大阪 : 日本結晶成長学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-339
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3101900
http://id.ndl.go.jp/bib/3101900
Bibliographic Record Category (NDL): 632