反応性マグネトロンスパッタ法によるAlN膜の作製と特性
Available with Digitized Contents Transmission Service
Find on the publisher's website
NDL Digital Collections
Available for viewing via the Digitized Contents Transmission Service for Individuals to official registered users of the NDL, who resides in Japan.
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 刑部 富夫大石 宗司
- Periodical title
- 新居浜工業高等専門学校紀要. 理工学編 / 新居浜工業高等専門学校 編
- No. or year of volume/issue
- (通号 23) 1987.01
- Sequential issue number
- 23
- Pages
- p18～21
- Publication date of volume/issue (W3CDTF)
- 1987-01
- ISSN (Periodical Title)
- 0286-2743