光集積回路の微細加工技術(超微細加工技術の進展<特集>)

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 53(6) 1987.06

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Material Type: 記事
Title: 光集積回路の微細加工技術
Author/Editor: 浅川潔
Series Title: 超微細加工技術の進展<特集>
Author Heading: 浅川潔
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 53(6) 1987.06
Volume: 53
Issue: 6
Pages: p861～864
Publication date of volume/issue (W3CDTF): 1987-06
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3129220
http://id.ndl.go.jp/bib/3129220
Bibliographic Record Category (NDL): 632