同軸円筒形イオン源とレジスト薄膜作成(第27回真空に関する連合講演会プロシーディングス--昭和61年11月12日～14日,大阪)

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Material Type: 記事
Title: 同軸円筒形イオン源とレジスト薄膜作成
Author/Editor: 玉野順次
Series Title: 第27回真空に関する連合講演会プロシーディングス--昭和61年11月12日～14日,大阪
Author Heading: 玉野順次
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 30(5) 1987.05
Volume: 30
Issue: 5
Pages: p378～381
Publication date of volume/issue (W3CDTF): 1987-05
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3129420
http://id.ndl.go.jp/bib/3129420
Bibliographic Record Category (NDL): 632