Volume number(130)
3″φ高均一GaAs...

3″φ高均一GaAsエピタキシャルウエハーの開発

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3″φ高均一GaAsエピタキシャルウエハーの開発

Call No. (NDL)
Z16-298
Bibliographic ID of National Diet Library
3130509
Material type
記事
Author
三浦 祥紀 他
Publisher
大阪 : 住友電気工業
Publication date
1987-03
Material Format
Digital
Journal name
住友電気 (通号 130) 1987.03
Publication Page
p.p84~88
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Digital

Material Type
記事
Author/Editor
三浦 祥紀 他
Author Heading
Periodical title
住友電気
No. or year of volume/issue
(通号 130) 1987.03
Sequential issue number
130
Pages
p84~88
Publication date of volume/issue (W3CDTF)
1987-03
ISSN (Periodical Title)
0562-5815