Functions of Diluent Gas in a KrCl Excimer Laser

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Functions of Diluent Gas in a KrCl Excimer Laser

Call No. (NDL)
Z14-125
Bibliographic ID of National Diet Library
3130850
Material type
記事
Author
Kenshi Nakamuraほか
Publisher
神戸 : 甲南大学
Publication date
1986
Material Format
Paper
Journal name
甲南大学紀要. 理学編 / 甲南大学 編 33(2) 1986
Publication Page
p.p185~191
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Paper

Material Type
記事
Author/Editor
Kenshi Nakamura
Shiro Horiguchi
Toshizo Nakaya
Periodical title
甲南大学紀要. 理学編 / 甲南大学 編
No. or year of volume/issue
33(2) 1986
Volume
33
Issue
2
Pages
p185~191
Publication date of volume/issue (W3CDTF)
1986