Development of An Ion Beam CVD Apparatus
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- Material Type
- 記事
- Author/Editor
- Osamu TabataSaburo Kimura
- Author Heading
- Periodical title
- 大阪工業技術試験所報告 / 工業技術院大阪工業技術研究所 編
- No. or year of volume/issue
- (通号 371) 1987.03
- Sequential issue number
- 371
- Pages
- p1～65
- Publication date of volume/issue (W3CDTF)
- 1987-03
- ISSN (Periodical Title)
- 0472-1438