反応性イオンプレーティング法による窒化アルミニウム皮膜形成に及ぼす窒素ガス圧およびイオン化電流の影響

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Material Type: 記事
Title: 反応性イオンプレーティング法による窒化アルミニウム皮膜形成に及ぼす窒素ガス圧およびイオン化電流の影響
Author/Editor: 桑野三郎他
Author Heading: 桑野三郎
Periodical title: 金属表面技術 / 金属表面技術協会 [編]
No. or year of volume/issue: 38(6) 1987.06
Volume: 38
Issue: 6
Pages: p228～233
Publication date of volume/issue (W3CDTF): 1987-06
ISSN (Periodical Title): 0026-0614
ISSN-L (Periodical Title): 0026-0614
Publication (Periodical Title): 東京 : 金属表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Article Type: 記事分類: 金属工学・鉱山工学--金属加工--表面処理
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3133570
http://id.ndl.go.jp/bib/3133570
Bibliographic Record Category (NDL): 632