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エレクトロニクス産業関連の欠陥検査 (表面欠陥検査の現状と問題点<特集>)

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エレクトロニクス産業関連の欠陥検査(表面欠陥検査の現状と問題点<特集>)

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
3138742
Material type
記事
Author
小野 明
Publisher
東京 : 精密工学会
Publication date
1987-08
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 53(8) 1987.08
Publication Page
p.p1158~1160
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Paper Digital

Material Type
記事
Author/Editor
小野 明
Author Heading
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
53(8) 1987.08
Volume
53
Issue
8
Pages
p1158~1160