ウエハ自転研削法に関する研究-2-シリコンウエハ研削面の真直度に関する研究

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 53(8) 1987.08

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Material Type: 記事
Title: ウエハ自転研削法に関する研究-2-シリコンウエハ研削面の真直度に関する研究
Author/Editor: 松井敏
堀内毅
Author Heading: 松井敏
堀内毅
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 53(8) 1987.08
Volume: 53
Issue: 8
Pages: p1265～1270
Publication date of volume/issue (W3CDTF): 1987-08
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Article Type: 記事分類: 機械工学--機械工作--研削加工
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3141409
http://id.ndl.go.jp/bib/3141409
Bibliographic Record Category (NDL): 632