CVD反応機構の数値...

CVD反応機構の数値シミュレーション

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CVD反応機構の数値シミュレーション

Call No. (NDL)
Z16-263
Bibliographic ID of National Diet Library
3142616
Material type
記事
Author
結城 昭正ほか
Publisher
東京 : 三菱電機エンジニアリングe-ソリューション&サービス事業部 ; 1962-2023
Publication date
1987-09
Material Format
Paper
Journal name
三菱電機技報 61(9) 1987.09
Publication Page
p.p750~753
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Paper

Material Type
記事
Author/Editor
結城 昭正
松井 安次
Periodical title
三菱電機技報
No. or year of volume/issue
61(9) 1987.09
Volume
61
Issue
9
Pages
p750~753
Publication date of volume/issue (W3CDTF)
1987-09