高周波イオンプレーテ...

高周波イオンプレーティング装置の製作

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高周波イオンプレーティング装置の製作

Call No. (NDL)
Z16-297
Bibliographic ID of National Diet Library
3142642
Material type
記事
Author
村上 健司 他
Publisher
浜松 : 静岡大学電子工学研究所
Publication date
1987-08
Material Format
Paper
Journal name
静岡大学電子工学研究所研究報告 22(1) 1987.08
Publication Page
p.p29~35
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Paper

Material Type
記事
Author/Editor
村上 健司 他
Author Heading
Periodical title
静岡大学電子工学研究所研究報告
No. or year of volume/issue
22(1) 1987.08
Volume
22
Issue
1
Pages
p29~35
Publication date of volume/issue (W3CDTF)
1987-08